The SEMI series pumps have been specially designed for the semiconductor industry. The entire assembly process of these unique products is completed in ISO class 5 (according to ISO 14644-1). It involves double cleaning of the parts, testing with de-ionized water, and finally sealing in plastic foil.
All parts of the SEMI T and SEMI H pumps in contact with the product are made of PTFE (polytetrafluoroethylene), the parts of the SEMI E series in contact with the product are made of UPPE (ultra pure polyethylene). SEMI E series parts in contact with the product are made of INOX 316L.